@misc{indiciae575120ce39fe,
  title = {Effect of Ion Bombardment on the Chemical Properties of Crystalline Tantalum Pentoxide Films},
  author = {Israel Perez and Victor Sosa and Fidel Gamboa Perera and Jose Trinidad Elizalde Galindo and Jose Luis Enriquez-Carrejo and Pierre Giovanni Mani Gonzalez},
  year = {2019},
  doi = {10.1016/j.vacuum.2019.04.037},
  url = {https://arxiv.org/abs/1804.02067},
  note = {Source identifier: 1804.02067}
}