TY  - RPRT
TI  - Effect of Ion Bombardment on the Chemical Properties of Crystalline Tantalum Pentoxide Films
AU  - Israel Perez
AU  - Victor Sosa
AU  - Fidel Gamboa Perera
AU  - Jose Trinidad Elizalde Galindo
AU  - Jose Luis Enriquez-Carrejo
AU  - Pierre Giovanni Mani Gonzalez
PY  - 2019
DO  - 10.1016/j.vacuum.2019.04.037
UR  - https://arxiv.org/abs/1804.02067
ID  - 1804.02067
ER  -