@misc{indiciaef5c6f2563b10,
  title = {Fabrication of comb-drive actuators for straining nanostructured suspended graphene},
  author = {M. Goldsche and G. J. Verbiest and T. Khodkov and J. Sonntag and N. von den Driesch and D. Buca and C. Stampfer},
  year = {2018},
  doi = {10.1088/1361-6528/aacdec},
  url = {https://arxiv.org/abs/1804.03871},
  note = {Source identifier: 1804.03871}
}