@misc{indiciae2439b0cb6ec8, title = {Consistent simulation of capacitive radio-frequency discharges and external matching networks}, author = {Frederik Schmidt and Thomas Mussenbrock and Jan Trieschmann}, year = {2018}, doi = {10.1088/1361-6595/aae429}, url = {https://arxiv.org/abs/1804.05638}, note = {Source identifier: 1804.05638} }