TY  - RPRT
TI  - Consistent simulation of capacitive radio-frequency discharges and external matching networks
AU  - Frederik Schmidt
AU  - Thomas Mussenbrock
AU  - Jan Trieschmann
PY  - 2018
DO  - 10.1088/1361-6595/aae429
UR  - https://arxiv.org/abs/1804.05638
ID  - 1804.05638
ER  -