@misc{indiciae8bf59aba829f, title = {Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates}, author = {Shaun Ferdous and Sreyash Sarkar and Frederic Marty and Patrick Poulichet and William César and E. Nefzaoui and Tarik Bourouina}, year = {2018}, doi = {10.1088/1361-6439/aab6bd}, url = {https://arxiv.org/abs/1804.07524}, note = {Source identifier: 1804.07524} }