TY  - RPRT
TI  - Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates
AU  - Shaun Ferdous
AU  - Sreyash Sarkar
AU  - Frederic Marty
AU  - Patrick Poulichet
AU  - William César
AU  - E. Nefzaoui
AU  - Tarik Bourouina
PY  - 2018
DO  - 10.1088/1361-6439/aab6bd
UR  - https://arxiv.org/abs/1804.07524
ID  - 1804.07524
ER  -