@misc{indiciae886f574e45af, title = {Pushing the Limits of Broadband and High Frequency Metamaterial Silicon Antireflection Coatings}, author = {K. P. Coughlin and J. J. McMahon and K. T. Crowley and B. J. Koopman and K. H. Miller and S. M. Simon and E. J. Wollack}, year = {2018}, doi = {10.1007/s10909-018-1955-7}, url = {https://arxiv.org/abs/1804.08368}, note = {Source identifier: 1804.08368} }