@misc{indiciae9f8ba7b689bf,
  title = {Calculation and selection of silicon to glass anodic bonding modes based on the criterion of minimum residual stress},
  author = {Leonid S. Sinev},
  year = {2018},
  url = {https://arxiv.org/abs/1804.08644},
  note = {Source identifier: 1804.08644}
}