@misc{indiciaec5cdd2e7aff4,
  title = {Influence of post-deposition annealing on the chemical states of crystalline tantalum pentoxide films},
  author = {Israel Perez and Victor Sosa and Fidel Gamboa and Jose Trinidad Elizalde Galindo and Jose L. Enriquez-Carrejo and Rurik Farias and Pierre Giovanni Mani Gonzalez},
  year = {2018},
  doi = {10.1007/s00339-018-2198-9},
  url = {https://arxiv.org/abs/1804.09538},
  note = {Source identifier: 1804.09538}
}