TY  - RPRT
TI  - Influence of post-deposition annealing on the chemical states of crystalline tantalum pentoxide films
AU  - Israel Perez
AU  - Victor Sosa
AU  - Fidel Gamboa
AU  - Jose Trinidad Elizalde Galindo
AU  - Jose L. Enriquez-Carrejo
AU  - Rurik Farias
AU  - Pierre Giovanni Mani Gonzalez
PY  - 2018
DO  - 10.1007/s00339-018-2198-9
UR  - https://arxiv.org/abs/1804.09538
ID  - 1804.09538
ER  -