@misc{indiciaeef4a034c5403,
  title = {Nanopore fabrication and characterization by helium ion microscopy},
  author = {D. Emmrich and A. Beyer and A. Nadzeyka and S. Bauerdick and J. C. Meyer and J. Kotakoski and A. Gölzhäuser},
  year = {2018},
  doi = {10.1063/1.4947277},
  url = {https://arxiv.org/abs/1805.00292},
  note = {Source identifier: 1805.00292}
}