@misc{indiciaec9fdf6fd58c4,
  title = {Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge},
  author = {S. Sharma and N. Sirse and M. M. Turner and A. R. Ellingboe},
  year = {2018},
  doi = {10.1063/1.5031221},
  url = {https://arxiv.org/abs/1805.00742},
  note = {Source identifier: 1805.00742}
}