TY  - RPRT
TI  - Influence of driving frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge
AU  - S. Sharma
AU  - N. Sirse
AU  - M. M. Turner
AU  - A. R. Ellingboe
PY  - 2018
DO  - 10.1063/1.5031221
UR  - https://arxiv.org/abs/1805.00742
ID  - 1805.00742
ER  -