@misc{indiciae633d538ad027,
  title = {Fabrication of micro fluidic cavities using Si-to-glass anodic bonding},
  author = {N. Zhelev and T. S. Abhilash and R. G. Bennett and E. N. Smith and B. Ilic and J. M. Parpia and L. V. Levitin and X. Rojas and A. Casey and J. Saunders},
  year = {2018},
  doi = {10.1063/1.5031837},
  url = {https://arxiv.org/abs/1805.00958},
  note = {Source identifier: 1805.00958}
}