@misc{indiciaedec6c96e1ca5, title = {Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light}, author = {Sten A. Reijers and Dmitry Kurilovich and Francesco Torretti and Hanneke Gelderblom and Oscar O. Versolato}, year = {2018}, doi = {10.1063/1.5026950}, url = {https://arxiv.org/abs/1805.05647}, note = {Source identifier: 1805.05647} }