TY  - RPRT
TI  - INCA - Inductively Coupled Array Discharge
AU  - Philipp Ahr
AU  - Tsanko V. Tsankov
AU  - Jan Kuhfeld
AU  - Uwe Czarnetzki
PY  - 2018
DO  - 10.1088/1361-6595/aadb69
UR  - https://arxiv.org/abs/1806.02043
ID  - 1806.02043
ER  -