TY  - RPRT
TI  - Flow sensor based on the snap-through detection of a curved micromechanical beam
AU  - Yoav Kessler
AU  - Robert Ilic
AU  - Slava Krylov
AU  - Alex Liberzon
PY  - 2018
UR  - https://arxiv.org/abs/1806.05396
ID  - 1806.05396
ER  -