@misc{indiciaee0698710b599,
  title = {Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge},
  author = {Sarveshwar Sharma and Abhijit Sen and N. Sirse and M. M. Turner and A. R. Ellingboe},
  year = {2018},
  doi = {10.1063/1.5045816},
  url = {https://arxiv.org/abs/1806.06560},
  note = {Source identifier: 1806.06560}
}