TY  - RPRT
TI  - Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge
AU  - Sarveshwar Sharma
AU  - Abhijit Sen
AU  - N. Sirse
AU  - M. M. Turner
AU  - A. R. Ellingboe
PY  - 2018
DO  - 10.1063/1.5045816
UR  - https://arxiv.org/abs/1806.06560
ID  - 1806.06560
ER  -