@misc{indiciaebda200bc7e60,
  title = {Microscope Projection Photolithography Based on Ultraviolet Light-emitting Diodes},
  author = {Minjae Kwon and Young-Gu Ju},
  year = {2018},
  doi = {10.1088/1361-6404/aac804},
  url = {https://arxiv.org/abs/1806.08718},
  note = {Source identifier: 1806.08718}
}