TY  - RPRT
TI  - Microscope Projection Photolithography Based on Ultraviolet Light-emitting Diodes
AU  - Minjae Kwon
AU  - Young-Gu Ju
PY  - 2018
DO  - 10.1088/1361-6404/aac804
UR  - https://arxiv.org/abs/1806.08718
ID  - 1806.08718
ER  -