@misc{indiciae67563c6506e5,
  title = {Non-contact XUV metrology of Ru/B4C multilayer optics by means of Hartmann wavefront analysis},
  author = {Mabel Ruiz-Lopez and Hugo Dacasa and Benoit Mahieu and Magali Lozano and Philippe Zeitoun and Davide Bleiner},
  year = {2018},
  doi = {10.1364/ao.57.001315},
  url = {https://arxiv.org/abs/1806.10664},
  note = {Source identifier: 1806.10664}
}