TY  - RPRT
TI  - Non-contact XUV metrology of Ru/B4C multilayer optics by means of Hartmann wavefront analysis
AU  - Mabel Ruiz-Lopez
AU  - Hugo Dacasa
AU  - Benoit Mahieu
AU  - Magali Lozano
AU  - Philippe Zeitoun
AU  - Davide Bleiner
PY  - 2018
DO  - 10.1364/ao.57.001315
UR  - https://arxiv.org/abs/1806.10664
ID  - 1806.10664
ER  -