@misc{indiciae9c1aa9b12c96,
  title = {Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics},
  author = {Enrico Serra and Bruno Morana and Antonio Borrielli and Francesco Marin and Gregory Pandraud and Antonio Pontin and Giovanni Andrea Prodi and Pasqualina M. Sarro and Michele Bonaldi},
  year = {2018},
  doi = {10.1109/jmems.2018.2876593},
  url = {https://arxiv.org/abs/1806.11513},
  note = {Source identifier: 1806.11513}
}