@misc{indiciae67f630143a1e,
  title = {Particle tracking of microelectromechanical system performance and reliability},
  author = {Craig R. Copeland and Craig D. McGray and Jon Geist and Samuel M. Stavis},
  year = {2018},
  doi = {10.1109/jmems.2018.2874771},
  url = {https://arxiv.org/abs/1807.00852},
  note = {Source identifier: 1807.00852}
}