TY  - RPRT
TI  - Particle tracking of microelectromechanical system performance and reliability
AU  - Craig R. Copeland
AU  - Craig D. McGray
AU  - Jon Geist
AU  - Samuel M. Stavis
PY  - 2018
DO  - 10.1109/jmems.2018.2874771
UR  - https://arxiv.org/abs/1807.00852
ID  - 1807.00852
ER  -