TY - RPRT TI - The role of surface quenching of the singlet delta molecule in a capacitively coupled oxygen discharge AU - Andrea Proto AU - J. T. Gudmundsson PY - 2018 DO - 10.1088/1361-6595/aaca06 UR - https://arxiv.org/abs/1807.03102 ID - 1807.03102 ER -