@misc{indiciae21c58ca04577,
  title = {Data Efficient Lithography Modeling with Transfer Learning and Active Data Selection},
  author = {Yibo Lin and Meng Li and Yuki Watanabe and Taiki Kimura and Tetsuaki Matsunawa and Shigeki Nojima and David Z. Pan},
  year = {2018},
  url = {https://arxiv.org/abs/1807.03257},
  note = {Source identifier: 1807.03257}
}