@misc{indiciae1f35136918dc,
  title = {99.992 \% \$\textasciicircum{}\{28\}\$Si CVD-grown epilayer on 300 mm substrates for large scale integration of silicon spin qubits},
  author = {V. Mazzocchi and P. G. Sennikov and A. D. Bulanov and M. F. Churbanov and B. Bertrand and L. Hutin and J. P. Barnes and M. N. Drozdov and J. M. Hartmann and M. Sanquer},
  year = {2018},
  doi = {10.1016/j.jcrysgro.2018.12.010},
  url = {https://arxiv.org/abs/1807.04968},
  note = {Source identifier: 1807.04968}
}