@misc{indiciae6878eebb3017,
  title = {Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage},
  author = {Robbert Voorhoeve and Robin de Rozario and Wouter Aangenent and Tom Oomen},
  year = {2020},
  doi = {10.1109/tcst.2020.2974140},
  url = {https://arxiv.org/abs/1807.06942},
  note = {Source identifier: 1807.06942}
}