TY  - RPRT
TI  - Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage
AU  - Robbert Voorhoeve
AU  - Robin de Rozario
AU  - Wouter Aangenent
AU  - Tom Oomen
PY  - 2020
DO  - 10.1109/tcst.2020.2974140
UR  - https://arxiv.org/abs/1807.06942
ID  - 1807.06942
ER  -