@misc{indiciaef1be1d0538a6,
  title = {Substrate surface engineering for high-quality silicon/aluminum superconducting resonators},
  author = {C. T. Earnest and J. H. Béjanin and T. G. McConkey and E. A. Peters and A. Korinek and H. Yuan and M. Mariantoni},
  year = {2018},
  doi = {10.1088/1361-6668/aae548},
  url = {https://arxiv.org/abs/1807.08072},
  note = {Source identifier: 1807.08072}
}