@misc{indiciae171ef2aa94b9,
  title = {Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions},
  author = {G. Seniutinas and A. Weber and C. Padeste and I. Sakellari and M. Farsari and C. David},
  year = {2018},
  url = {https://arxiv.org/abs/1807.08462},
  note = {Source identifier: 1807.08462}
}