TY  - RPRT
TI  - Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions
AU  - G. Seniutinas
AU  - A. Weber
AU  - C. Padeste
AU  - I. Sakellari
AU  - M. Farsari
AU  - C. David
PY  - 2018
UR  - https://arxiv.org/abs/1807.08462
ID  - 1807.08462
ER  -