TY  - RPRT
TI  - Negative substrate bias induced modifications of the physical properties of DC sputter deposited nano-crystalline Mo thin films
AU  - Shilpam Sharma
AU  - Abhirami S.
AU  - E. P. Amaladass
AU  - Awadhesh Mani
PY  - 2018
DO  - 10.1088/2053-1591/aad50b
UR  - https://arxiv.org/abs/1807.08491
ID  - 1807.08491
ER  -