@misc{indiciae25a76f037d05, title = {Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass}, author = {Frederik Kotz and Patrick Risch and Karl Arnold and Alexander Quick and Michael Thiel and Andrei Hrynevich and Paul D. Dalton and Dorothea Helmer and Bastian E. Rapp}, year = {2018}, doi = {10.1038/s41467-019-09497-z}, url = {https://arxiv.org/abs/1807.09054}, note = {Source identifier: 1807.09054} }