TY  - RPRT
TI  - Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge
AU  - Jean-Maxime Orlac'H
AU  - Tatiana Novikova
AU  - Vincent Giovangigli
AU  - Erik Johnson
AU  - Pere Roca
PY  - 2019
DO  - 10.1088/1361-6595/ab067d
UR  - https://arxiv.org/abs/1808.03449
ID  - 1808.03449
ER  -