@misc{indiciaed4669d80f7d8,
  title = {STM-induced desorption and lithographic patterning of Cl-Si(100)-(2x1)},
  author = {K. J Dwyer and Michael Dreyer and R. E. Butera},
  year = {2019},
  doi = {10.1021/acs.jpca.9b07127},
  url = {https://arxiv.org/abs/1808.05690},
  note = {Source identifier: 1808.05690}
}