@misc{indiciaefb108dd4d311,
  title = {Creation and Fixing of Lithography Hotspots with Synopsys Tools},
  author = {I-Lun Tseng and Valerio Perez and Yongfu Li and Zhao Chuan Lee and Vikas Tripathi and Jonathan Yoong Seang Ong},
  year = {2018},
  url = {https://arxiv.org/abs/1808.05998},
  note = {Source identifier: 1808.05998}
}