TY  - RPRT
TI  - Creation and Fixing of Lithography Hotspots with Synopsys Tools
AU  - I-Lun Tseng
AU  - Valerio Perez
AU  - Yongfu Li
AU  - Zhao Chuan Lee
AU  - Vikas Tripathi
AU  - Jonathan Yoong Seang Ong
PY  - 2018
UR  - https://arxiv.org/abs/1808.05998
ID  - 1808.05998
ER  -