@misc{indiciae009edc87bf81,
  title = {Atomic layer deposition of titanium nitride for quantum circuits},
  author = {A. Shearrow and G. Koolstra and S. J. Whiteley and N. Earnest and P. S. Barry and F. J. Heremans and D. D. Awschalom and E. Shirokoff and D. I. Schuster},
  year = {2018},
  doi = {10.1063/1.5053461},
  url = {https://arxiv.org/abs/1808.06009},
  note = {Source identifier: 1808.06009}
}