TY  - RPRT
TI  - Measurement of thickness of thin film by fitting to the intensity profile of Fresnel diffraction from a nano phase step
AU  - Ali Motazedifard
AU  - S. Dehbod
AU  - A. Salehpour
PY  - 2018
DO  - 10.1364/josaa.35.002010
UR  - https://arxiv.org/abs/1808.06486
ID  - 1808.06486
ER  -