@misc{indiciaedd63b8515598,
  title = {Comparison of processing-induced deformations of InP bonded to Si determined by e-beam metrology: direct vs. adhesive bonding},
  author = {Aurimas Sakanas and Elizaveta Semenova and Luisa Ottaviano and Jesper Mørk and Kresten Yvind},
  year = {2018},
  url = {https://arxiv.org/abs/1808.06888},
  note = {Source identifier: 1808.06888}
}