TY - RPRT TI - Realizing $Q$ > 300,000 in diamond microdisks for optomechanics via etch optimization AU - Matthew Mitchell AU - David P. Lake AU - Paul E. Barclay PY - 2019 DO - 10.1063/1.5053122 UR - https://arxiv.org/abs/1808.09883 ID - 1808.09883 ER -