@misc{indiciae9fcda2ddf10a,
  title = {Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias},
  author = {Michelle Marie S. Villamayor and Julien Keraudy and Tetsuhide Shimizu and Rommel Paulo B. Viloan and Robert Boyd and Daniel Lundin and J. E. Greene and Ivan Petrova and Ulf Helmersson},
  year = {2018},
  url = {https://arxiv.org/abs/1808.10614},
  note = {Source identifier: 1808.10614}
}