@misc{indiciaecd88a30d1998, title = {Impurity in low energy Ar+ ion beam is the cause of pattern formation on Si}, author = {Dipak Bhowmik and Manabendra Mukherjee and Prasanta Karmakar}, year = {2018}, url = {https://arxiv.org/abs/1809.00525}, note = {Source identifier: 1809.00525} }