TY  - RPRT
TI  - Impurity in low energy Ar+ ion beam is the cause of pattern formation on Si
AU  - Dipak Bhowmik
AU  - Manabendra Mukherjee
AU  - Prasanta Karmakar
PY  - 2018
UR  - https://arxiv.org/abs/1809.00525
ID  - 1809.00525
ER  -