@misc{indiciae3b2b16db359b,
  title = {Limits of surface analysis of thin film compounds using LEIS},
  author = {Andrey A. Zameshin and Andrey E. Yakshin and Jacobus M. Sturm and Cristiane Stilhano Vilas Boas and Fred Bijkerk},
  year = {2018},
  url = {https://arxiv.org/abs/1809.01918},
  note = {Source identifier: 1809.01918}
}