@misc{indiciaef4c91bcb324d,
  title = {Breaking the doping limit in silicon by deep impurities},
  author = {Mao Wang and A. Debernardi and Y. Berencén and R. Heller and Chi Xu and Ye Yuan and Yufang Xie and R. Böttger and L. Rebohle and W. Skorupa and M. Helm and S. Prucnal and Shengqiang Zhou},
  year = {2018},
  doi = {10.1103/physrevapplied.11.054039},
  url = {https://arxiv.org/abs/1809.06055},
  note = {Source identifier: 1809.06055}
}